HBO-IC Microlithography lamps for Nikon i-line systems
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Products
| Product |
|
Data sheet | ||
|---|---|---|---|---|
|
HBO 1000 W/NEL
|
DC | |||
|
HBO 1002 W/NEL
|
DC | ||
|
|
HBO 1002 W/NIL
|
DC | ||
|
HBO 2000 W/NIL
|
DC | ||
|
|
HBO 2001 W/NIL
|
DC | ||
|
|
HBO 2002 W/NIL
|
DC | ||
|
|
HBO 2011 W/NIL
|
DC | ||
|
|
HBO 2011 W/NILH
|
DC | ||
|
|
HBO 2501 W/NIL
|
DC | ||
|
|
HBO 2510 W/NIL
|
DC | ||
|
|
HBO 2510 W/NILH
|
DC | ||
|
HBO 3500 W/NIL
|
DC | |||
|
|
HBO 5002 W/NIL
|
DC | ||
|
HBO 5003 W/NIL
|
DC | |||
|
|
HBO 7500 W/NIL
|
DC | ||
|
HBO
|
DC |